diff --git a/klayout/grain.xml b/klayout/grain.xml index 493ba286..e54aced8 100644 --- a/klayout/grain.xml +++ b/klayout/grain.xml @@ -4,7 +4,7 @@ 0.4.29 0.27 SiEPIC EBeam PDK - A Process Design Kit for Silicon Photonics fabricated using Electron Beam Lithography (ANT, UW, SiEPICfab) + A Process Design Kit for Silicon Photonics fabricated using Electron Beam Lithography, at Applied Nanotools (ANT) https://github.com/siepic/SiEPIC_EBeam_PDK/blob/master/README.md https://github.com/siepic/SiEPIC_EBeam.git/trunk/klayout Lukas Chrostowski, Jaspreet Jhoja, Mustafa Hammood, Brett Poulsen, Jonas Flueckiger, Rounak Singh Narde, Chris Zeqin Lu, Nathan Smith, Stefan Preble, Claudio Alarcon-Reyes